MEMS LAB                          

                                                      

Following is the list of equipments that we have in the MEMS lab.

1) Zeus - High Power Microscope with Camera

2) Solitec - Photoresist spinner 5110 - C

3) Vecco - Dektak Series V Profilometer

4) Suss MicroTec - MA6/BA6 Mask Aligner

5) Plasma Asher

6) Blue M -  Clean Room oven 80 Deg

7) Blue M -  Clean Room oven 120 Deg

8) Denton Vacuum  - E - Beam unit explorer 14

9) Intelvac -ION Mill

10) Two Tube Furnaces

11) Jiplec - Rapid Thermal Annealing (RTA)  Furnace Jet First 100

12)  STS - DRIE for Si Machining

13) STS - DRIE for Machining Oxides ( In process )